Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Huiliang Cao
Springer Verlag, Singapore, 2024
172,25 €On orderDelivery: 2-3 weeks
The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.It presents the principle, structure and related technology of silicon-based MEMS gyroscope.
- ISBN-13
- 9789811992490
- ISBN-10
- 9811992495
- Publisher
- Springer Verlag, Singapore
- Year
- 2024
- Publication date
- 2024-04-19
- Pages
- 224
- Dimensions
- 235x155x