Laser Heat-Mode Lithography
Jingsong Wei
Springer Verlag, Singapore, 2019
121,95 €On orderDelivery: 2-3 weeks
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.
- ISBN-13
- 9789811509421
- ISBN-10
- 9811509425
- Publisher
- Springer Verlag, Singapore
- Year
- 2019
- Publication date
- 2019-11-29
- Pages
- 208
- Dimensions
- 244x163x18
- Weight
- 462