Formation of KNbO3 Thin Films for Self-Powered ReRAM Devices and Artificial Synapses
Tae-Ho Lee
Springer Verlag, Singapore, 2018
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This thesis describes an investigation into homogeneous KN crystalline films grown on Pt/Ti/SiO2/Si substrates, amorphous KN films grown on TiN/Si substrates using the RF-sputtering method, and the ferroelectic and piezoelectric properties of these KN films.
- ISBN-13
- 9789811347887
- ISBN-10
- 9811347883
- Publisher
- Springer Verlag, Singapore
- Year
- 2018
- Publication date
- 2018-12-23
- Pages
- 98
- Dimensions
- 233x154x11
- Weight
- 200