Poly-SiGe for MEMS-above-CMOS Sensors
Ann Witvrouw, Kristin De Meyer, Pilar Gonzalez Ruiz
Springer, 2015
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Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ?m Cu-backend CMOS.
- ISBN-13
- 9789401781404
- ISBN-10
- 9401781400
- Publisher
- Springer
- Year
- 2015
- Publication date
- 2015-08-08
- Pages
- 199
- Dimensions
- 235x155x