Planar Processing Primer
G. Anner
Springer, 2011
121,95 €On orderDelivery: 2-3 weeks
Planar Processing Primer is based on lecture notes for a silicon planar process ing lecture/lab course offered at the University of Illinois-UC for over fifteen years. The text describes and explains, at an introductory level, the principal processing steps used to convert raw silicon into a semiconductor device or integrated circuit.
- ISBN-13
- 9789401066822
- ISBN-10
- 9401066825
- Publisher
- Springer
- Year
- 2011
- Publication date
- 2011-10-28
- Pages
- 634
- Dimensions
- 229x152x