Adhesion Aspects in MEMS/NEMS
Brill, 2011
475,50 €On orderDelivery: 2-3 weeks
This book discusses equilibrium vapor adsorption and capillary force, and effects of contacting surfaces on MEMS device reliability. It serves as a fountainhead for new research ideas and new application vistas and enhances the performance and durability/robustness of MEMS/NEMS.
- ISBN-13
- 9789004190948
- ISBN-10
- 9004190945
- Publisher
- Brill
- Year
- 2011
- Publication date
- 2011-02-18
- Pages
- 410
- Dimensions
- 245x170x
- Weight
- 940