Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
Xiao-Sheng Zhang
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, 2019
66,50 €On orderDelivery: 2-3 weeks
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials.
- ISBN-13
- 9783662569573
- ISBN-10
- 3662569574
- Publisher
- Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
- Year
- 2019
- Publication date
- 2019-03-27
- Pages
- 122
- Dimensions
- 235x155x