Nanoimprint Lithography: An Enabling Process for Nanofabrication
Weimin Zhou
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, 2016
196,75 €On orderDelivery: 2-3 weeks
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.
- ISBN-13
- 9783662510865
- ISBN-10
- 3662510863
- Publisher
- Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
- Year
- 2016
- Publication date
- 2016-08-23
- Pages
- 249
- Dimensions
- 233x156x18
- Weight
- 416