Micro and Nano Fabrication
Hans H. Gatzen, Jurg Leuthold, Volker Saile
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, 2015
145,75 €On orderDelivery: 2-3 weeks
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
- ISBN-13
- 9783662443941
- ISBN-10
- 3662443945
- Publisher
- Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
- Year
- 2015
- Publication date
- 2015-01-20
- Pages
- 519
- Dimensions
- 240x164x31
- Weight
- 952