Micromachines as Tools for Nanotechnology
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, 2012
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This book addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.
- ISBN-13
- 9783642624650
- ISBN-10
- 3642624650
- Publisher
- Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
- Year
- 2012
- Publication date
- 2012-10-29
- Pages
- 211
- Dimensions
- 158x242x18
- Weight
- 354