Epitaxy of Semiconductors

Udo W. Pohl

Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, 2013

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The book covers the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and the description of the major growth techniques metalorganic vapor phase epitaxy, molecular beam epitaxy and liquid phase epitaxy.

ISBN-13
9783642329692
ISBN-10
3642329691
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Year
2013
Publication date
2013-01-10
Pages
325
Dimensions
244x159x24
Weight
646