Femtosecond Laser Micromachining

Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, 2012

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This book describes state-of-the-art micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and is exploitable for fabrication of complex microsystems.

ISBN-13
9783642233654
ISBN-10
3642233651
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Year
2012
Publication date
2012-03-14
Pages
486
Dimensions
240x165x33
Weight
884