Thin Film Analysis by X-Ray Scattering
Mario (IHP Microelectronics, Frankfurt/Oder, Germany) Birkholz
Wiley-VCH Verlag GmbH, 2005
189,25 €On orderDelivery: 2-3 weeks
With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films.
- ISBN-13
- 9783527310524
- ISBN-10
- 3527310525
- Publisher
- Wiley-VCH Verlag GmbH
- Year
- 2005
- Publication date
- 2005-11-15
- Pages
- 378
- Dimensions
- 248x170x26
- Weight
- 766