Metal Impurities in Silicon- and Germanium-Based Technologies
Cor Claeys, Eddy Simoen
Springer International Publishing AG, 2018
198,50 €On orderDelivery: 2-3 weeks
material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
- ISBN-13
- 9783319939247
- ISBN-10
- 3319939246
- Publisher
- Springer International Publishing AG
- Year
- 2018
- Publication date
- 2018-08-22
- Pages
- 438
- Dimensions
- 235x155x