Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
Maria Angela Pampillon Arce
Springer International Publishing AG, 2018
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This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
- ISBN-13
- 9783319882840
- ISBN-10
- 3319882848
- Publisher
- Springer International Publishing AG
- Year
- 2018
- Publication date
- 2018-05-18
- Pages
- 164
- Dimensions
- 235x155x