Outlook and Challenges of Nano Devices, Sensors, and MEMS
Springer International Publishing AG, 2018
172,25 €On orderDelivery: 2-3 weeks
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things.
- ISBN-13
- 9783319845005
- ISBN-10
- 3319845004
- Publisher
- Springer International Publishing AG
- Year
- 2018
- Publication date
- 2018-07-13
- Pages
- 521
- Dimensions
- 235x155x