Coaxial Lithography

Tuncay Ozel

Springer International Publishing AG, 2018

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In contrast to previous work, which was largely limited to one-dimensional modifications, Tuncay Ozel presents a technique, termed coaxial Lithography (COAL), which allows for the synthesis of coaxial nanowires in a parallel fashion with sub-10 nanometer resolution in both the axial and radial dimensions.

ISBN-13
9783319832876
ISBN-10
3319832875
Publisher
Springer International Publishing AG
Year
2018
Publication date
2018-06-15
Pages
92
Dimensions
235x155x