Planar Waveguide Optical Sensors
Aradhana Dutta, Bidyut Deka, Partha Pratim Sahu
Springer International Publishing AG, 2018
121,95 €On orderDelivery: 2-3 weeks
This book concentrates on the design and development of integrated optic waveguide sensors using silicon based materials. It gives the readers the full background in the field of sensors, reasons for using silicon oxynitride as a potential waveguide material as well as its fabrication processes and possible uses.
- ISBN-13
- 9783319817347
- ISBN-10
- 3319817345
- Publisher
- Springer International Publishing AG
- Year
- 2018
- Publication date
- 2018-04-22
- Pages
- 179
- Dimensions
- 235x155x