Ion Beam Modification of Solids

Springer International Publishing AG, 2018

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This book presents the method of ion beam modification of solids in realization, theory and applications in a comprehensive way. Furthermore, general concepts of damage evolution as a function of ion mass, ion fluence, ion flux and temperature are described in detail and their limits and applicability are discussed.

ISBN-13
9783319815473
ISBN-10
3319815474
Publisher
Springer International Publishing AG
Year
2018
Publication date
2018-05-31
Pages
534
Dimensions
235x155x