Piezoelectric MEMS Resonators
Springer International Publishing AG, 2018
145,75 €On orderDelivery: 2-3 weeks
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.
- ISBN-13
- 9783319804057
- ISBN-10
- 3319804057
- Publisher
- Springer International Publishing AG
- Year
- 2018
- Publication date
- 2018-07-12
- Pages
- 424
- Dimensions
- 235x155x