Nanopositioning Technologies
Springer International Publishing AG, 2018
121,95 €On orderDelivery: 2-3 weeks
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
- ISBN-13
- 9783319795393
- ISBN-10
- 3319795392
- Publisher
- Springer International Publishing AG
- Year
- 2018
- Publication date
- 2018-03-30
- Pages
- 409
- Dimensions
- 235x155x