Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Seongbo Shim, Youngsoo Shin
Springer International Publishing AG, 2018
121,95 €On orderDelivery: 2-3 weeks
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
- ISBN-13
- 9783319762937
- ISBN-10
- 3319762931
- Publisher
- Springer International Publishing AG
- Year
- 2018
- Publication date
- 2018-04-03
- Pages
- 138
- Dimensions
- 235x155x