Subsecond Annealing of Advanced Materials

Springer International Publishing AG, 2013

66,50 €On orderDelivery: 2-3 weeks

The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing.

ISBN-13
9783319031309
ISBN-10
3319031309
Publisher
Springer International Publishing AG
Year
2013
Publication date
2013-12-30
Pages
321
Dimensions
242x159x23
Weight
652