Simulation of Semiconductor Devices and Processes
Springer Verlag GmbH, 1993
100,95 €On orderDelivery: 2-3 weeks
Presents the research and development results in the area of numerical process and device simulation. This book covers the following topics: process simulation and equipment modeling, device modeling and simulation of complex structures, device simulation and parameter extraction for circuit models, integration of process, algorithms and software.
- ISBN-13
- 9783211825044
- ISBN-10
- 3211825045
- Publisher
- Springer Verlag GmbH
- Year
- 1993
- Publication date
- 1993-08-01
- Pages
- 524
- Dimensions
- 179x254x35
- Weight
- 1028