Epitaxy of Semiconductors

Udo W. Pohl

Springer Nature Switzerland AG, 2021

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The book discusses the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and it describes the major growth techniques: metalorganic vapor-phase epitaxy, molecular-beam epitaxy, and liquid-phase epitaxy.

ISBN-13
9783030438715
ISBN-10
3030438716
Publisher
Springer Nature Switzerland AG
Year
2021
Publication date
2021-07-22
Pages
535
Dimensions
155x233x35
Weight
836