Process Variations in Microsystems Manufacturing
Michael Huff
Springer Nature Switzerland AG, 2020
172,25 €On orderDelivery: 2-3 weeks
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
- ISBN-13
- 9783030405588
- ISBN-10
- 3030405583
- Publisher
- Springer Nature Switzerland AG
- Year
- 2020
- Publication date
- 2020-04-10
- Pages
- 521
- Dimensions
- 235x155x