Toward Inertial-Navigation-on-Chip

Haoran Wen

Springer Nature Switzerland AG, 2019

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This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes.

ISBN-13
9783030254698
ISBN-10
3030254690
Publisher
Springer Nature Switzerland AG
Year
2019
Publication date
2019-09-25
Pages
127
Dimensions
235x155x