Flash Lamp Annealing
Denise Reichel, Lars Rebohle, Slawomir Prucnal
Springer Nature Switzerland AG, 2020
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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.
- ISBN-13
- 9783030233013
- ISBN-10
- 3030233014
- Publisher
- Springer Nature Switzerland AG
- Year
- 2020
- Publication date
- 2020-08-14
- Pages
- 288
- Dimensions
- 235x155x