Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Seongbo Shim, Youngsoo Shin
Springer Nature Switzerland AG, 2019
121,95 €On orderDelivery: 2-3 weeks
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
- ISBN-13
- 9783030094553
- ISBN-10
- 3030094553
- Publisher
- Springer Nature Switzerland AG
- Year
- 2019
- Publication date
- 2019-02-08
- Pages
- 138
- Dimensions
- 234x154x12
- Weight
- 246