Metal Impurities in Silicon- and Germanium-Based Technologies
Cor Claeys, Eddy Simoen
Springer Nature Switzerland AG, 2019
198,50 €On orderDelivery: 2-3 weeks
material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
- ISBN-13
- 9783030067472
- ISBN-10
- 3030067475
- Publisher
- Springer Nature Switzerland AG
- Year
- 2019
- Publication date
- 2019-01-30
- Pages
- 438
- Dimensions
- 235x155x