Silicon Carbide Microelectromechanical Systems For Harsh Environments
Rebecca (Univ Of Edinburgh, Uk) Cheung
Imperial College Press, 2006
130,95 €On orderDelivery: 2-3 weeks
Describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. This book contains scientific information concerning SiC MEMS for harsh environments.
- ISBN-13
- 9781860946240
- ISBN-10
- 1860946240
- Publisher
- Imperial College Press
- Year
- 2006
- Publication date
- 2006-06-30
- Pages
- 192
- Dimensions
- 233x164x20
- Weight
- 482