Lithography
ISTE Ltd and John Wiley & Sons Inc, 2010
208,50 €On orderDelivery: 2-3 weeks
* Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents * A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
- ISBN-13
- 9781848212022
- ISBN-10
- 184821202X
- Publisher
- ISTE Ltd and John Wiley & Sons Inc
- Year
- 2010
- Publication date
- 2010-11-19
- Pages
- 320
- Dimensions
- 163x240x29
- Weight
- 744