Advanced Ta-Based Diffusion Barriers for Cu Interconnects
Rene Hubner
Nova Science Publishers Inc, 2009
59,75 €On orderDelivery: 2-3 weeks
- ISBN-13
- 9781604564518
- ISBN-10
- 1604564512
- Publisher
- Nova Science Publishers Inc
- Year
- 2009
- Publication date
- 2009-03-17
- Pages
- 102
- Dimensions
- 227x153x8
- Weight
- 192