Handbook of Semiconductor Manufacturing Technology
Taylor & Francis Inc, 2007
392,75 €On orderDelivery: 2-3 weeks
A guide to the individual processes, equipment, and materials of semiconductor manufacturing technologies. It features chapters on silicon materials, SOI materials and devices, surface preparation, ion implantation, dopant diffusion, in-line metrology, yield modeling, photomask fabrication, failure analysis, and damascene copper electroplating.
- ISBN-13
- 9781574446753
- ISBN-10
- 1574446754
- Publisher
- Taylor & Francis Inc
- Year
- 2007
- Publication date
- 2007-07-09
- Pages
- 1720
- Dimensions
- 257x186x69
- Weight
- 1972