Chemical-Mechanical Polishing – Fundamentals and Challenges: Volume 566
Materials Research Society, 2000
57,50 €On orderDelivery: 2-3 weeks
This book brings together many of the active players in the field to focus on the interdisciplinary nature of these challenges. It reflects, to some extent, the role played by both academic institutions and multinational corporations in opening up the frontiers in the field of CMP for wider dissemination. Both experimental and theoretical contributions are included.
- ISBN-13
- 9781558994737
- ISBN-10
- 1558994734
- Publisher
- Materials Research Society
- Year
- 2000
- Publication date
- 2000-02-10
- Pages
- 296
- Dimensions
- 234x157x23
- Weight
- 591