Introductory MEMS
Richard A. Layton, Thomas M. Adams
Springer-Verlag New York Inc., 2014
98,50 €On orderDelivery: 2-3 weeks
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
- ISBN-13
- 9781489984210
- ISBN-10
- 1489984216
- Publisher
- Springer-Verlag New York Inc.
- Year
- 2014
- Publication date
- 2014-09-07
- Pages
- 440
- Dimensions
- 155x234x27
- Weight
- 696