Plasma Charging Damage
Kin P. Cheung
Springer London Ltd, 2012
238,25 €On orderDelivery: 2-3 weeks
In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.
- ISBN-13
- 9781447110620
- ISBN-10
- 1447110625
- Publisher
- Springer London Ltd
- Year
- 2012
- Publication date
- 2012-08-30
- Pages
- 346
- Dimensions
- 234x157x19
- Weight
- 522