Microelectronic Test Structures for CMOS Technology

Manjul Bhushan, Mark B. Ketchen

Springer-Verlag New York Inc., 2011

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Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products.

ISBN-13
9781441993762
ISBN-10
1441993762
Publisher
Springer-Verlag New York Inc.
Year
2011
Publication date
2011-08-30
Pages
373
Dimensions
235x155x