SiGe and Si Strained-Layer Epitaxy for Silicon Heterostructure Devices

John D. (Georgia Institute of Technology, Atlanta, USA) Cressler

Taylor & Francis Inc, 2007

283,95 €On orderDelivery: 2-3 weeks

Focuses on the materials science aspects of silicon heterostructure. This book defines the various advances in the Si-SiGe strained-layer epitaxy for device applications. It covers modern SiGe epitaxial growth techniques, EPI defects and dopant diffusion in thin films, stability constraints, and electronic properties of SiGe and Si-C alloys.

ISBN-13
9781420066852
ISBN-10
1420066854
Publisher
Taylor & Francis Inc
Year
2007
Publication date
2007-12-13
Pages
262
Dimensions
254x178x
Weight
650