Nanoparticle Engineering for Chemical-Mechanical Planarization
Jea-Gun Park, Ungyu Paik
Taylor & Francis Inc, 2009
317,25 €On orderDelivery: 2-3 weeks
Increasing reliance on electronic devices demands products demostration high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology.
- ISBN-13
- 9781420059113
- ISBN-10
- 1420059114
- Publisher
- Taylor & Francis Inc
- Year
- 2009
- Publication date
- 2009-02-20
- Pages
- 224
- Dimensions
- 234x156x
- Weight
- 570