MEMS
Taylor & Francis Inc, 2005
283,95 €On orderDelivery: 2-3 weeks
Details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. This volume offers an overview of MEMS materials and examines various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB[registered] technology, and deep reactive ion etching.
- ISBN-13
- 9780849391385
- ISBN-10
- 0849391385
- Publisher
- Taylor & Francis Inc
- Year
- 2005
- Publication date
- 2005-11-29
- Pages
- 664
- Dimensions
- 254x178x
- Weight
- 1153