Radio-Frequency Capacitive Discharges
Mikhail N. Shneider, Nikolai A. Yatsenko, Yuri P. Raizer
Taylor & Francis Inc, 1995
558,50 €On orderDelivery: 2-3 weeks
Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and research results.
- ISBN-13
- 9780849386442
- ISBN-10
- 0849386446
- Publisher
- Taylor & Francis Inc
- Year
- 1995
- Publication date
- 1995-02-24
- Pages
- 304
- Dimensions
- 160x237x25
- Weight
- 564