X-Ray Metrology in Semiconductor Manufacturing
Brian K. (University of Durham, UK) Tanner, D. Keith (Bede Plc, Durham, UK) Bowen
Taylor & Francis Inc, 2006
317,25 €On orderDelivery: 2-3 weeks
Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. It covers the essential metrological questions of precision and repeatability, absolute accuracy and spot size.
- ISBN-13
- 9780849339288
- ISBN-10
- 0849339286
- Publisher
- Taylor & Francis Inc
- Year
- 2006
- Publication date
- 2006-01-24
- Pages
- 296
- Dimensions
- 245x162x21
- Weight
- 586