Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing
Taylor & Francis Inc, 2005
392,75 €On orderDelivery: 2-3 weeks
Introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the molecule-reaction-based technologies. This book details the procedures and underlying concepts involved along with other wet process technologies and applications.
- ISBN-13
- 9780849335433
- ISBN-10
- 0849335434
- Publisher
- Taylor & Francis Inc
- Year
- 2005
- Publication date
- 2005-12-21
- Pages
- 400
- Dimensions
- 262x186x28
- Weight
- 884