MEMS and NEMS

Sergey Edward (Rochester Institute of Technology, New York, USA) Lyshevski

Taylor & Francis Inc, 2002

317,25 €On orderDelivery: 2-3 weeks

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience.

ISBN-13
9780849312625
ISBN-10
0849312620
Publisher
Taylor & Francis Inc
Year
2002
Publication date
2002-01-18
Pages
461
Dimensions
234x156x
Weight
1040