Run-to-Run Control in Semiconductor Manufacturing
Taylor & Francis Inc, 2000
317,25 €On orderDelivery: 2-3 weeks
Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
- ISBN-13
- 9780849311789
- ISBN-10
- 0849311780
- Publisher
- Taylor & Francis Inc
- Year
- 2000
- Publication date
- 2000-11-30
- Pages
- 366
- Dimensions
- 242x158x22
- Weight
- 630