Fabrication of Silicon Microprobes for Optical Near-Field Applications
Esashi (Tohoku University, Japan) Masayoshi, Ono (Tohoku University, Japan) Takahito, Phan Ngoc (Tohoku University, Sendai, Japan) Minh
Taylor & Francis Inc, 2002
220,75 €On orderDelivery: 2-3 weeks
Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes.
- ISBN-13
- 9780849311543
- ISBN-10
- 0849311543
- Publisher
- Taylor & Francis Inc
- Year
- 2002
- Publication date
- 2002-01-15
- Pages
- 192
- Dimensions
- 234x156x
- Weight
- 409