Fabrication of Silicon Microprobes for Optical Near-Field Applications

Esashi (Tohoku University, Japan) Masayoshi, Ono (Tohoku University, Japan) Takahito, Phan Ngoc (Tohoku University, Sendai, Japan) Minh

Taylor & Francis Inc, 2002

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Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes.

ISBN-13
9780849311543
ISBN-10
0849311543
Publisher
Taylor & Francis Inc
Year
2002
Publication date
2002-01-15
Pages
192
Dimensions
234x156x
Weight
409