Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Saburo Nonogaki, Toshio Ito, Ueno Takumi
Taylor & Francis Inc, 1998
437,75 €On orderDelivery: 2-3 weeks
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
- ISBN-13
- 9780824799519
- ISBN-10
- 0824799518
- Publisher
- Taylor & Francis Inc
- Year
- 1998
- Publication date
- 1998-06-25
- Pages
- 336
- Dimensions
- 229x152x
- Weight
- 612