Particle Control for Semiconductor Manufacturing
R.P. Donovan
Taylor & Francis Inc, 1990
520,75 €On orderDelivery: 2-3 weeks
There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In
- ISBN-13
- 9780824782429
- ISBN-10
- 0824782429
- Publisher
- Taylor & Francis Inc
- Year
- 1990
- Publication date
- 1990-01-26
- Pages
- 480
- Dimensions
- 254x178x
- Weight
- 1089