Handbook of Photomask Manufacturing Technology
Taylor & Francis Inc, 2005
437,75 €On orderDelivery: 2-3 weeks
Offers a comprehensive summary of the various areas of mask technology. This work discusses conventional masks and their supporting technologies, as well as technologies such as extreme ultraviolet, electron projection, ion projection and X-ray lithography.
- ISBN-13
- 9780824753740
- ISBN-10
- 0824753747
- Publisher
- Taylor & Francis Inc
- Year
- 2005
- Publication date
- 2005-04-07
- Pages
- 728
- Dimensions
- 254x178x
- Weight
- 1430